Chambers
Central elements for multichamber UHV-systems.
RDC
The OmniVac RDC Distribution Chamber is the central element of our multichamber UHV-systems...
FEL 100
Our Fast Entry Loadlock offers easy and reliable access to your multi chamber system. It is equi...
TRA 100
The Transport Chambers are designed to fit to the OmniVac Fast Entry Loadlocks. It can optionally...
